With Cr-film blank on glass, MEMS patterning can be processed on glass and metal structures by lithographic and wet etching techniques. We can achieve 5um capability and etching depth aspect ratio of 1.
applications:

  • reticle for optical microscope and machine/athletic guns.
  • ITO testkey
  • microfluid channel for bio-array.

Nanoimprint Mold

Glass Mold

MEMS patterning

Electroplating