Mask blank quality improvement and cost down

  • cleaning and sputtering efficiency enhancement
  • defect AOI inspection
  • Quartz mask blank business

Quartz and Sodalime substrates works

  • Quartz slimming
  • Quartz edge works
  • Quartz polishing and resizing

Micro patterning technologies

  • development process
  • glass etching process
  • thick resist coating
  • anti-scratch coating

Mask protection film coating

  • AS/AF coating
  • AOI defect inspection
  • ESD and AS materials