1.產品品名ID命名是依基板材料，尺寸，鉻膜種類，光阻種類以及厚度定義。具體說明如下:
SL
700X800X8.0
L
AZ1500
1U
SL: soda lime glass
Q: quartz
B: borofloat or TFT glass
QR: recycled Qz
SR: recycled soda lime glass
BR: recycled borofloat
Size: short side x long side x thickness
Cr-film types:
Soda: S or L
Qz: A or N
Others: H, 2L
etc..
Resist type:
AZ1500
AZ1505
TFP650
IP3500
RZJ304
Thickness:
1U: 1um
50: 5000Å
53: 5300Å
70: 7000Å
22U: 2.2um
2.CF grade Qz800920,700800
CF Qz700x800/800x920x8t Blanks
| Film Type | Chrome | Low reflective | Double-side Low reflective |
| Quartz Substrate Size | 700x800x8t, 800×920×8t mm If you need other size, please contact us. Quality area 20mm |
||
| Optical Density | 3.8 ±0.4 | 3.8 ±0.4(within plate and p-to-p) | 3.8 ±0.4 |
| Reflectivity(λ=436nm) | 55% | 10±5% | 10±5% |
| Thickness | 1000 ±100Å | 1250 ±125Å | 1550 ±150Å |
| Pinhole | Not limited <5µm < 0.01pcs/cm2 as 5~10µm Not allowed > 10µm (AOI Takano scan) |
||
| Etching Time | 90±10sec | 90±10sec | 90±10se |
TFT Qz Blank Specification
| Film Type | Chrome | Low reflective | Double-side Low reflective |
| Quartz Substrate Size | 520×800×10t mm(TFT grade) If you need other size, please contact us. Quality area 20mm |
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| Optical Density | 3.8 ±0.4 | 3.8 ±0.3(within plate and p-to-p) | 3.8 ±0.4 |
| Reflectivity(λ=436nm) | 55% | 10±5% Or 12±3% |
10±5% |
| Thickness | 1000 ±100Å | 1250 ±125Å | 1550 ±150Å |
| Pinhole | Not limited <2µm < 0.01pcs/cm2 as 2~5µm Not allowed > 5µm (AOI Takano scan) |
||
| Etching Time | 90±10sec | 90±10sec | 90±10se |
3.確保針孔規格AOI系統
